Improved method for detection of “hot spots” in microelectronic devices

Abstract

New method of liquid crystal thermography of “hot spots” in crystals of microelectronic products have been developed. The method is based on the use of local cholesteric phase image of “hot spot” in transparent smectic phase of cholesteric liquid crystal against a background of clearly visible topological elements on the surface of microelectronic device crystal. Examples of “hot spot” images in crystals of different types of integrated circuits are shown.

Keywords

• hot spots
• hot spot visualization
• defects
• nematic and cholesteric liquid crystals
• liquid crystal phases
• integrated circuits