ScAlN PMUTs Based on Flexurally Suspended Membrane for Long-Range Detection
Shutao Yao,
Wenling Shang,
Guifeng Ta,
Jinyan Tao,
Haojie Liu,
Xiangyong Zhao,
Jianhe Liu,
Bin Miao,
Jiadong Li
Affiliations
Shutao Yao
Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
Wenling Shang
Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
Guifeng Ta
School of Electrical and Mechanical Engineering, Changchun University of Science and Technology, Changchun 130022, China
Jinyan Tao
Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
Haojie Liu
School of Electrical and Mechanical Engineering, Changchun University of Science and Technology, Changchun 130022, China
Xiangyong Zhao
Key Laboratory of Optoelectronic Material and Device, Department of Physics, Shanghai Normal University, Shanghai 200234, China
Jianhe Liu
School of Electrical and Mechanical Engineering, Changchun University of Science and Technology, Changchun 130022, China
Bin Miao
Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
Jiadong Li
Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing applications. However, the rapid movement of miniature robots in complex environments necessitates higher ranging capabilities from sensors, making the enhancement of PMUT sensing distance critically important. In this paper, a scandium-doped aluminum nitride (ScAlN) PMUT based on a flexurally suspended membrane is proposed. Unlike the traditional fully clamped design, the PMUT incorporates a partially clamped membrane, thereby extending the vibration displacement and enhancing the output sound pressure. Experimental results demonstrate that at a resonant frequency of 78 kHz, a single PMUT generates a sound pressure level (SPL) of 112.2 dB at a distance of 10 mm and achieves a high receiving sensitivity of 12.3 mV/Pa. Distance testing reveals that a single PMUT equipped with a horn can achieve a record-breaking distance sensing range of 11.2 m when used alongside a device capable of simultaneously transmitting and receiving ultrasound signals. This achievement is significant for miniaturized and integrated applications that utilize ultrasound for long-range target detection.
