Optimizing optical STEM detection for faster acquisition speeds in scanning electron microscopy

• Kievits Arent J.,
• Molnar Monika,
• Hoogenboom Jacob P.

Affiliations

Kievits Arent J.

Department of Imaging Physics, Delft University of Technology

Molnar Monika

Department of Imaging Physics, Delft University of Technology

Hoogenboom Jacob P.

Department of Imaging Physics, Delft University of Technology