In this work, three kinds of tungsten powders with different particle sizes were spheroidized by radio-frequency (RF) inductively coupled plasma spheroidization. The spheroidization behavior of these tungsten powders was investigated and compared. The spheroidization effects of irregular tungsten powder improves with the decrease in degree of agglomeration and increases with primary particle size. Spherical tungsten powder from irregular powder with a primary particle size of 19.9 μm and an agglomeration coefficient of 1.59 had the best spheroidization effect; its apparent density, hall flow time, and spheroidization ratio are 9.36 g/cm3, 6.28 s/50 g, and 98%, respectively. The results show that irregular feedstock tungsten powder with a smaller primary particle size and higher agglomeration degree has a poor spheroidization effect because it is easily affected by the gas flow and deviates from the high temperature zone. On the contrary, irregular feedstock tungsten powder with larger primary particle sizes and lower agglomeration degrees has better spheroidization effects.