Electrostatic Self-Assembly of Diamond Nanoparticles onto Al- and N-Polar Sputtered Aluminum Nitride Surfaces
Taro Yoshikawa,
Markus Reusch,
Verena Zuerbig,
Volker Cimalla,
Kee-Han Lee,
Magdalena Kurzyp,
Jean-Charles Arnault,
Christoph E. Nebel,
Oliver Ambacher,
Vadim Lebedev
Affiliations
Taro Yoshikawa
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany
Markus Reusch
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany
Verena Zuerbig
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany
Volker Cimalla
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany
Kee-Han Lee
Atomic Energy and Alternative Energies Commission (CEA), Laboratory of Applied Research on Software-Intensive Technologies (LIST), Diamond Sensors Laboratory, F-91191 Gif-sur-Yvette, France
Magdalena Kurzyp
Atomic Energy and Alternative Energies Commission (CEA), Laboratory of Applied Research on Software-Intensive Technologies (LIST), Diamond Sensors Laboratory, F-91191 Gif-sur-Yvette, France
Jean-Charles Arnault
Atomic Energy and Alternative Energies Commission (CEA), Laboratory of Applied Research on Software-Intensive Technologies (LIST), Diamond Sensors Laboratory, F-91191 Gif-sur-Yvette, France
Christoph E. Nebel
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany
Oliver Ambacher
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany
Vadim Lebedev
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany
Electrostatic self-assembly of diamond nanoparticles (DNPs) onto substrate surfaces (so-called nanodiamond seeding) is a notable technique, enabling chemical vapor deposition (CVD) of nanocrystalline diamond thin films on non-diamond substrates. In this study, we examine this technique onto differently polarized (either Al- or N-polar) c-axis oriented sputtered aluminum nitride (AlN) film surfaces. This investigation shows that Al-polar films, as compared to N-polar ones, obtain DNPs with higher density and more homogeneously on their surfaces. The origin of these differences in density and homogeneity is discussed based on the hydrolysis behavior of AlN surfaces in aqueous suspensions.
