Capacitive Accelerometers with Beams Based on Alternated Segments of Different Widths

Abstract

Microelectromechanical (MEM) Accelerometers measure the accelerations or vibrations experienced by objects due to inertial forces or mechanical excitations. To improve their proof mass displacement, several alternatives have been used, such as the design of different shapes of suspension beams. In this work, a new shape of beam is proposed based on alternated segments of different widths. To analyze its performance, one-quarter, middle and complete accelerometers were calculated and simulated; the results were compared with similar cases using conventional uniform-shaped beams. A notable improvement in the proof mass displacement was obtained in all cases, especially with the proposed symmetrical-shaped beam. Harmonic response and explicit dynamic analysis were also considered to discover performance when they are subjected to structural load. An improvement in amplitude displacement was also observed, as well as operation frequency reduction. From the explicit dynamic analysis, a faster performance of the accelerometer with uniform arms can be observed; however, it responds at a lower range of input velocities. A performance comparison of the proposed beam is presented considering the two reported accelerometers. Finally, from the variation in the width of the thinner segment of the symmetrical arms, it can be observed that it is possible to obtain an increment in the displacement of the proof mass of 39.57% and a decrement in natural frequency of 15.30%, with respect to the case of the uniform arm. Other advantages of the symmetric beam are the stress distribution, reducing its effect on the proof mass, as well as their low cross-axis sensitivity. Simulations were performed with ANSYS.

Keywords

• ANSYS
• cantilever
• displacement modeling
• harmonic analysis
• explicit dynamic analysis
• silicon