Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing

Abstract

Optoelectronic integrated circuit (OEIC) technology has attracted considerable research attention. Studies have achieved numerous breakthroughs in the basic scientific problems, key technologies, demonstration applications, and industrial promotions of OEIC. This study details the technical process, development status, existing problems, and future research trends of the design, manufacturing, and packaging of OEIC to provide a systematic summary of OEIC technology.

Keywords

• optoelectronic integrated circuit (OEIC)
• design
• manufacture
• integrate
• optical interconnection
• encapsulation