Sensitive MoS2 photodetector cell with high air-stability for multifunctional in-sensor computing
Dong-Hui Zhao,
Zheng-Hao Gu,
Tian-Yu Wang,
Xiao-Jiao Guo,
Xi-Xi Jiang,
Min Zhang,
Hao Zhu,
Lin Chen,
Qing-Qing Sun,
David Wei Zhang
Affiliations
Dong-Hui Zhao
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China; Zhangjiang Fudan International Innovation Center, Shanghai 201203, China; Corresponding authors.
Zheng-Hao Gu
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
Tian-Yu Wang
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
Xiao-Jiao Guo
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
Xi-Xi Jiang
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
Min Zhang
College of Data Science, Jiaxing University, Jiaxing City 314001, China
Hao Zhu
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China; Corresponding authors.
Lin Chen
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
Qing-Qing Sun
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China; Corresponding authors.
David Wei Zhang
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
With the development of artificial intelligence and the Internet of Things, the number of sensory nodes is growing rapidly, leading to the exchange of large quantities of redundant data between sensors and computing units. In-sensor computing schemes, which integrate sensing and processing, have provided a promising route to addressing the sensing/processing bottleneck by reducing power consumption, time delay and hardware redundancy. In this study, an in-sensor computing architecture involving a photoelectronic cell based on a wafer-scale two-dimensional MoS2 thin film was demonstrated. The MoS2 photodetector cell used a top-gate device structure with indium tin oxide (ITO) as the transparent gate electrode, which exhibited high air-stability and a high photoresponsivity (R) up to 555.8 A W–1 at an illumination power density (Pin) of 16.0 µW cm–2 (λ = 500 nm). Additionally, a MoS2 photodetector array with uniform photoresponsive characteristics was achieved. Furthermore, logic gates, including inverter, NAND, and NOR, were achieved based on MoS2 photodetector cells. Such multifunctional and robust in-sensor computing was ascribed to the uniform wafer-scale MoS2 film grown by atomic layer deposition (ALD) and the unique device structure. Because the detection of optical signals and logic operations were achieved through MoS2 photodetector cells with area efficiency, the proposed in-sensor computing device paves the way for potential applications in high-performance, integrated sensing and processing systems.
