Light: Science & Applications (Dec 2022)

Realising high aspect ratio 10 nm feature size in laser materials processing in air at 800 nm wavelength in the far-field by creating a high purity longitudinal light field at focus

  • Zhaoqing Li,
  • Olivier Allegre,
  • Lin Li

DOI
https://doi.org/10.1038/s41377-022-00962-x
Journal volume & issue
Vol. 11, no. 1
pp. 1 – 16

Abstract

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Holes of 10–30 nm in diameter are produced on sapphire with a depth to width aspect ratio of over 16 and a zero taper with a single pulse longitudinal field.