Proceedings
(Jun 2024)
Thermal Behavior of Biaxial Piezoelectric MEMS Scanner
- Laurent Mollard,
- Christel Dieppedale,
- Antoine Hamelin,
- François Gardien,
- Gwenael Le Rhun,
- Jean Hue,
- Laurent Frey,
- Gael Castellan
Affiliations
- Laurent Mollard
- University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
- Christel Dieppedale
- University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
- Antoine Hamelin
- University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
- François Gardien
- University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
- Gwenael Le Rhun
- University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
- Jean Hue
- University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
- Laurent Frey
- University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
- Gael Castellan
- University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
- DOI
-
https://doi.org/10.3390/proceedings2024097223
- Journal volume & issue
-
Vol. 97,
no. 1
p.
223
Abstract
Read online
This paper presents the thermal behavior of a non-resonant (quasi-static) biaxial piezoelectric MEMS scanner [...]
Keywords
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