Sub-diffraction limited nanogroove fabrication of 30 nm features on diamond films using 800 nm femtosecond laser irradiation
Daqi Zhang,
Tao Chen,
Tianlun Shen,
Yu Zhang,
Yingsong He,
Jinhai Si,
Xun Hou
Affiliations
Daqi Zhang
Key Laboratory of Physical Electronics and Devices, Ministry of Education and Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an, 710049, China
Tao Chen
Key Laboratory of Physical Electronics and Devices, Ministry of Education and Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an, 710049, China
Tianlun Shen
Key Laboratory of Physical Electronics and Devices, Ministry of Education and Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an, 710049, China
Yu Zhang
Key Laboratory of Physical Electronics and Devices, Ministry of Education and Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an, 710049, China
Yingsong He
Key Laboratory of Physical Electronics and Devices, Ministry of Education and Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an, 710049, China
Jinhai Si
Corresponding author.; Key Laboratory of Physical Electronics and Devices, Ministry of Education and Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an, 710049, China
Xun Hou
Key Laboratory of Physical Electronics and Devices, Ministry of Education and Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an, 710049, China
By controlling the 800 nm fs laser energy and applying an isopropyl alcohol environment, controlled sub-diffraction limited lithography with a characteristic structure of approximately 30 nm was achieved on the surface of diamond films, and diamond gratings with a period of 200 nm were fabricated. The fabrication of single grooves with a feature size of 30 nm demonstrates the potential for patterning periodic or nonperiodic structures, and the fabrication of 200 nm periodic grating structures demonstrates the ability of the technique to withstand laser proximity effects. This enhances the technology of diamond film nanofabrication and broadens its potential applications in areas such as optoelectronics and biology.
