Biocompatible Co-organic Composite Thin Film Deposited by VHF Plasma-Enhanced Atomic Layer Deposition at a Low Temperature

• Won Kyun Yeom,
• Jin Woong Lee,
• Jin-A Bae,
• Da In Sung,
• Taeyeop Kim,
• Jung Heon Lee,
• Geun Young Yeom

Affiliations

Won Kyun Yeom

SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, Suwon-si, Gyeonggi-do, Republic of Korea

Jin Woong Lee

School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do, Republic of Korea

Jin-A Bae

School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do, Republic of Korea

Da In Sung

School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do, Republic of Korea

Taeyeop Kim

School of Mechanical Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do, Republic of Korea

Jung Heon Lee

SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, Suwon-si, Gyeonggi-do, Republic of Korea

Geun Young Yeom

SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, Suwon-si, Gyeonggi-do, Republic of Korea