All Silicon Microdisplay Fabricated Utilizing 0.18 &#x03BC;m CMOS-IC With Monolithic Integration

Zepeng Li; Kunfeng Zhu; Xingfa Huang; Jianming Zhao; Kaikai Xu

doi:10.1109/JPHOT.2022.3160226

IEEE Photonics Journal (Jan 2022)

All Silicon Microdisplay Fabricated Utilizing 0.18 μm CMOS-IC With Monolithic Integration

Zepeng Li,
Kunfeng Zhu,
Xingfa Huang,
Jianming Zhao,
Kaikai Xu

Affiliations

Zepeng Li: ORCiD; State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, China
Kunfeng Zhu: Department of Process and Technology, SiChuan Institute of Solid-State Circuits, Chongqing, China
Xingfa Huang: Chongqing GigaChip Technology Company Ltd., Chongqing, China
Jianming Zhao: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, China
Kaikai Xu: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, China

DOI: https://doi.org/10.1109/JPHOT.2022.3160226
Journal volume & issue: Vol. 14, no. 2
pp. 1 – 5

Abstract

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A low voltage all silicon microdisplay is presented based on MOS-like gate-control all-Silicon light-emitting diode (LED) in standard 0.18 μm complementary metal oxide semiconductor (CMOS) technology. The MOS-like LED is designed under a PN alternate structure with polysilicon gate control electrode for high luminous intensity and low operating voltage. The microdisplay device is fabricated based on the LED as pixel units. The size of the proposed microdisplay device is 6.2 mm × 5.0 mm with a about 368 mW/mm2 luminous intensity at the stable operating voltage of 1.8 V.

All-Silicon CMOS LED microdisplay gate-control

Published in IEEE Photonics Journal

ISSN: 1943-0655 (Online)
Publisher: IEEE
Country of publisher: United States
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=4563994

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