Triangular-Shaped 5-DOF Piezoelectric Robot for Optical Lens Positioning

Abstract

The paper represents numerical and experimental investigations on a 5-DOF piezoelectric robot that can provide rotary and planar motions of the payload. The design of the robot is based on a single piezoelectric ring and a triangular-shaped passive layer made from stainless steel. Six semispherical contacts of alumina oxide were used as contact points for rotary and planar motions. Finally, the top electrode of the piezo ceramic ring was divided into six equal segments to control the 3-DOF angular and 2-DOF planar motions of the payload. Two harmonic signals of different frequencies are used to drive the piezoelectric robot. The robot operation is based on the excitation of the third radial vibration mode of the ring and the first bending mode of the trapezoidal-shaped cantilever. Motion control is performed by switching electric signals between the particular segments of the piezoelectric ring. A numerical investigation was performed to validate the operation principle of the robot and to analyze electrical and mechanical characteristics. Numerical investigations showed that the first bending mode of trapezoidal cantilevers and the third radial mode of the piezo ceramic ring were obtained at a frequency of 13.79 kHz and 95.75 kHz, respectively. Moreover, it was revealed that the coupling ratio between vibration amplitudes of passive and active segments is more than 4 times. The prototype of the piezoelectric robot was made and an experimental study was performed to validate the operating principle of the robot, as well as to investigate the dynamic characteristics. The investigation showed that the highest velocity of the planar motion is 22.3 mm/s while the maximum angular motion speed is 29.3 RPM when an excitation voltage of 200 Vp-p and payload of 25.1 g was applied.

Keywords

• 5-DOF piezoelectric robot
• planar motion
• rotary motion
• triangle-shaped, single piezoelectric ring