Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays

Abstract

Abstract In this work, we report that large area metal nanowire and polymer nanotube arrays were successfully patterned by photolithographic approach using anodic aluminum oxide (AAO) templates. Nanowires were produced by electrochemical deposition, and nanotubes by solution-wetting. The highly ordered patterns of nanowire and nanotube arrays were observed using scanning electron microscopy (SEM) and found to stand free on the substrate. The method is expected to play an important role in the application of microdevices in the future.

Keywords

• Pattern
• AAO
• Photolithographic approach
• Nanowire arrays
• Nanotube arrays