Micromachines (Jun 2025)
Improved DC and RF Characteristics of GaN HEMT Using a Back-Barrier and Locally Doped Barrier Layer
Abstract
To enhance the DC and RF performance of AlGaN/GaN HEMTs, a novel device structure was proposed and investigated through simulation. The key innovation of this new structure lies in the incorporation of an Al0.7In0.15Ga0.15N back-barrier layer and an N-type locally doped AlGaN barrier layer (BD-HEMT), based on conventional device architecture. The Al0.7In0.15Ga0.15N back-barrier layer effectively confines electrons within the channel, thereby increasing the electron concentration. Simultaneously, the N-type locally doped AlGaN barrier layer introduced beneath the gate supplies additional electrons to the channel, further enhancing the electron density. These modifications collectively lead to improved DC and RF characteristics of the device. Compared to the conventional AlGaN/GaN HEMT, BD-HEMT achieves a 24.8% increase in saturation drain current and a 10.4% improvement in maximum transconductance. Furthermore, the maximum cutoff frequency and maximum oscillation frequency are enhanced by 14.8% and 21.2%, respectively.
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