Measurement: Sensors (Dec 2021)
Feasibility study of multi-point two-dimensional profile measurement by 3-2-1 and 3×3 sensor layout
Abstract
New multi-point methods, the six-point method of 3-2-1 sensor layout and the nine-point method of 3 × 3 sensor layout, have been proposed as the two-dimensional profilometry for a machined flat surface. Monte Carlo simulations were carried out and properties of proposed methods were examined. As a result, it was shown that the six-point method, the minimum configuration that calculates the planar shape with only six displacement sensors, can obtain the equivalent result to that of the simple nine-point method. In the nine-point method with averaging, it was confirmed that the maximum and average values of the standard deviation of the reconstructed profile were reduced to 68% and 81%, respectively compared with simple nine-point method. The improved nine-point method that averages the pitching error to improve the data connection accuracy also proposed and this method reduced standard deviation, but effectiveness is limited.
