Micromachines (Apr 2020)

Editorial for the Special Issue on SiC Based Miniaturized Devices

  • Stephen E. Saddow,
  • Daniel Alquier,
  • Jing Wang,
  • Francesco LaVia,
  • Mariana Fraga

DOI
https://doi.org/10.3390/mi11040405
Journal volume & issue
Vol. 11, no. 4
p. 405

Abstract

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The MEMS devices are found in many of today’s electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc [...]

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