Micromachines
(Apr 2020)
Editorial for the Special Issue on SiC Based Miniaturized Devices
Stephen E. Saddow,
Daniel Alquier,
Jing Wang,
Francesco LaVia,
Mariana Fraga
Affiliations
Stephen E. Saddow
Department of Electrical Engineering, University of South Florida, 4202 East Fowler Avenue, ENB118 Tampa, FL 33620, USA
Daniel Alquier
GREMAN UMR-CNRS 7347, Université de Tours, 16 rue Pierre et Marie CURIE, BP 7155, 37071 Tours Cedex 2, France
Jing Wang
Department of Electrical Engineering, University of South Florida, 4202 East Fowler Avenue, ENB118 Tampa, FL 33620, USA
Francesco LaVia
CNR-IMM Sezione di Catania, Strada VIII 5-Zona Industriale, I-95121 Catania, Italy
Mariana Fraga
Instituto de Ciência e Tecnologia, Universidade Federal de São Paulo (UNIFESP), Rua Talim 330, São José dos Campos 12231-280, Brazil
DOI
https://doi.org/10.3390/mi11040405
Journal volume & issue
Vol. 11,
no. 4
p.
405
Abstract
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The MEMS devices are found in many of today’s electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc [...]
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