An analysis of the stability of spinning rotor gauges

Abstract

Spinning rotor gauges (SRGs) are commonly employed as transfer standards in the inter-laboratory comparisons of vacuum standards in the pressure range of 1.0 × 10−4 Pa–1.0 Pa. Calibration of an SRG is carried out by measuring the accommodation coefficient, known as the calibration factor. This study aims to analyze the stability of the spinning rotor gauges (SRGs) by determining the accommodation coefficients through the calibrations on the multi-stage static expansion system (MSSE1), deployed as a primary vacuum standard at TUBITAK UME (National Metrology Institute) of Turkey. To achieve this goal, the changes in the aforementioned coefficients over the years have been analyzed for six commercial SRGs. The results show that spinning rotor gauges that are handled carefully are adequately stable as a secondary standard.

Keywords

• Stability
• Spinning rotor gauge
• Accommodation coefficient
• Calibration factor
• Static expansion system
• Vacuum