Influence of Temperature Parameters on Morphological Characteristics of Plasma Deposited Zinc Oxide Nanoparticles
Tatyana Sergeevna Sazanova,
Leonid Alexandrovich Mochalov,
Alexander Alexandrovich Logunov,
Mikhail Alexandrovich Kudryashov,
Diana Georgievna Fukina,
Maksim Anatolevich Vshivtsev,
Igor Olegovich Prokhorov,
Pavel Andreevich Yunin,
Kirill Alexandrovich Smorodin,
Artem Anatolevich Atlaskin,
Andrey Vladimirovich Vorotyntsev
Affiliations
Tatyana Sergeevna Sazanova
Laboratory of Membrane and Catalytic Processes, Nanotechnology and Biotechnology Department, Nizhny Novgorod State Technical University n.a. R.E. Alekseev, Minin Str. 24, 603950 Nizhny Novgorod, Russia
Leonid Alexandrovich Mochalov
Chemical Engineering Laboratory, Research Institute for Chemistry, Lobachevsky State University of Nizhny Novgorod, Gagarin Ave. 23, 603022 Nizhny Novgorod, Russia
Alexander Alexandrovich Logunov
Chemical Engineering Laboratory, Research Institute for Chemistry, Lobachevsky State University of Nizhny Novgorod, Gagarin Ave. 23, 603022 Nizhny Novgorod, Russia
Mikhail Alexandrovich Kudryashov
Chemical Engineering Laboratory, Research Institute for Chemistry, Lobachevsky State University of Nizhny Novgorod, Gagarin Ave. 23, 603022 Nizhny Novgorod, Russia
Diana Georgievna Fukina
Chemical Engineering Laboratory, Research Institute for Chemistry, Lobachevsky State University of Nizhny Novgorod, Gagarin Ave. 23, 603022 Nizhny Novgorod, Russia
Maksim Anatolevich Vshivtsev
Chemical Engineering Laboratory, Research Institute for Chemistry, Lobachevsky State University of Nizhny Novgorod, Gagarin Ave. 23, 603022 Nizhny Novgorod, Russia
Igor Olegovich Prokhorov
Chemical Engineering Laboratory, Research Institute for Chemistry, Lobachevsky State University of Nizhny Novgorod, Gagarin Ave. 23, 603022 Nizhny Novgorod, Russia
Pavel Andreevich Yunin
Department for Technology of Nanostructures and Devices, Institute for Physics of Microstructures of the Russian Academy of Science, Academic Str. 7, Afonino, 603087 Nizhny Novgorod, Russia
Kirill Alexandrovich Smorodin
Chemical Engineering Laboratory, Research Institute for Chemistry, Lobachevsky State University of Nizhny Novgorod, Gagarin Ave. 23, 603022 Nizhny Novgorod, Russia
Artem Anatolevich Atlaskin
Laboratory of SMART Polymeric Materials and Technologies, Mendeleev University of Chemical Technology, Miusskaya Sq. 9, 125047 Moscow, Russia
Andrey Vladimirovich Vorotyntsev
Laboratory of Membrane and Catalytic Processes, Nanotechnology and Biotechnology Department, Nizhny Novgorod State Technical University n.a. R.E. Alekseev, Minin Str. 24, 603950 Nizhny Novgorod, Russia
Zinc oxide nanoparticles were obtained by plasma-enhanced chemical vapor deposition (PECVD) under optical emission spectrometry control from elemental high-purity zinc in a zinc–oxygen–hydrogen plasma-forming gas mixture with varying deposition parameters: a zinc source temperature, and a reactor temperature in a deposition zone. The size and morphological parameters of the zinc oxide nanopowders, structural properties, and homogeneity were studied. The study was carried out with use of methods such as scanning electron microscopy, X-ray structural analysis, and Raman spectroscopy, as well as statistical methods for processing and analyzing experimental data. It was established that to obtain zinc oxide nanoparticles with a given size and morphological characteristics using PECVD, it is necessary (1) to increase the zinc source temperature to synthesize more elongated structures in one direction (and vice versa), and (2) to decrease the reactor temperature in the deposition zone to reduce the transverse size of the deposited structures (and vice versa), taking into account that at relatively low temperatures instead of powder structures, films can form.
