Halide vapor phase epitaxy of monolayer molybdenum diselenide single crystals

Li Taotao; Yang Yang; Zhou Liqi; Sun Wenjie; Lin Weiyi; Liu Lei; Zou Xilu; Gao Si; Nie Yuefeng; Shi Yi; Wang Xinran

doi:10.1360/nso/20220055

National Science Open (Apr 2023)

Halide vapor phase epitaxy of monolayer molybdenum diselenide single crystals

Li Taotao,
Yang Yang,
Zhou Liqi,
Sun Wenjie,
Lin Weiyi,
Liu Lei,
Zou Xilu,
Gao Si,
Nie Yuefeng,
Shi Yi,
Wang Xinran

Affiliations

Li Taotao: ["National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"]
Yang Yang: ["National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"]
Zhou Liqi: ["National Laboratory of Solid State Microstructures, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"]
Sun Wenjie: ["National Laboratory of Solid State Microstructures, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"]
Lin Weiyi: ["School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China"]
Liu Lei: ["National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"]
Zou Xilu: ["National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"]
Gao Si: ["College of Material Science and Engineering, Nanjing Tech University, Nanjing 201110, China"]
Nie Yuefeng: ["National Laboratory of Solid State Microstructures, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"]
Shi Yi: ["National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"]
Wang Xinran: ["National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China","School of Integrated Circuits, Nanjing University, Suzhou 215163, China","Suzhou Laboratory, Suzhou 215000, China"]

DOI: https://doi.org/10.1360/nso/20220055
Journal volume & issue: Vol. 2

Abstract

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Single-crystalline transition metal dichalcogenides (TMD) films are of potential application in future electronics and optoelectronics. In this work, a halide vapor phase epitaxy (HVPE) strategy was proposed and demonstrated for the epitaxy of molybdenum diselenide (MoSe2) single crystals, in which metal halide vapors were in-situ produced by the chlorination of molybdenum as sources for the TMD growth. Combined with the epitaxial sapphire substrate, unidirectional domain alignment was successfully achieved and monolayer single-crystal MoSe2 films have been demonstrated on a 2-inch wafer for the first time. A series of characterizations ranging from centimeter to nanometer scales have been implemented to demonstrate the high quality and uniformity of the MoSe2. This work provides a universal strategy for the growth of TMD single-crystal films.

Published in National Science Open

ISSN: 2097-1168 (Print); 2097-1400 (Online)
Publisher: Science Press
Country of publisher: China
LCC subjects: Science; Technology: Engineering (General). Civil engineering (General)
Website: https://www.sciengine.com/NSO/home

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