In-plane structural and electronic anisotropy of nanoporous Pt films formed by oblique angle deposition

Abstract

Abstract Nanoporous Pt films fabricated by oblique angle deposition hold potential as electrocatalysts in various energy-related fields owing to their high surface area, structural stability, and adequate conductivity. In this study, we investigated the morphology, porosity, and electrical conductivity of nanoporous Pt thin films and systematically studied their interrelationships. Specifically, we revealed an in-plane anisotropy in the electrical conductivity that correlates with the surface morphology of the film. This anisotropy was evident in the resistance measurements along the in-plane lateral and vertical directions, which aligned well with our simple model. The results emphasize the significance of film morphology in determining the film’s electrical properties. This study contributes to the understanding of the physical properties of Pt films fabricated via oblique angle deposition and offers valuable insights for designing nanoporous films for various applications.

Keywords

• Oblique angle deposition
• Pt film
• Pt nanostructures
• Electrical anisotropy
• Porous film