Fully Integrated Pixelated 4D-STEM Detector for Scanning Electron Microscopes

• Stejskal Pavel,
• Motúz Rastislav,
• Horák Michal,
• Šikola Tomáš

Affiliations

Stejskal Pavel

AdvaScope

Motúz Rastislav

TESCAN Group

Horák Michal

Brno University of Technology, CEITEC

Šikola Tomáš

Brno University of Technology, Institute of Physical Engineering