Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process

Quanquan Sun; Jiaxuan Tang; Lifeng Shen; Jie Lan; Zhenfeng Shen; Junfeng Xiao; Xiao Chen; Jianguo Zhang; Yu Wu; Jianfeng Xu; Xuefang Wang

doi:10.3390/mi13060899

Micromachines (Jun 2022)

Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process

Quanquan Sun,
Jiaxuan Tang,
Lifeng Shen,
Jie Lan,
Zhenfeng Shen,
Junfeng Xiao,
Xiao Chen,
Jianguo Zhang,
Yu Wu,
Jianfeng Xu,
Xuefang Wang

Affiliations

Quanquan Sun: Shanghai Aerospace Control Technology Institute, Shanghai 201109, China
Jiaxuan Tang: State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
Lifeng Shen: Shanghai Aerospace Control Technology Institute, Shanghai 201109, China
Jie Lan: Shanghai Aerospace Control Technology Institute, Shanghai 201109, China
Zhenfeng Shen: Shanghai Aerospace Control Technology Institute, Shanghai 201109, China
Junfeng Xiao: State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
Xiao Chen: School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China
Jianguo Zhang: State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
Yu Wu: State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
Jianfeng Xu: State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
Xuefang Wang: State Key Laboratory of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China

DOI: https://doi.org/10.3390/mi13060899
Journal volume & issue: Vol. 13, no. 6
p. 899

Abstract

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In this paper, a high-precision, low-cost, batch processing nanoimprint method is proposed to process a spherical microlens array (MLA). The nanoimprint mold with high surface precision and low surface roughness was fabricated by single-point diamond turning. The anti-sticking treatment of the mold was carried out by perfluorooctyl phosphoric acid (PFOPA) liquid deposition. Through the orthogonal experiment of hot embossing with the treated mold and subsequent inductively coupled plasma (ICP) etching, the microstructure of MLA was transferred to the silicon substrate, with a root mean square error of 17.7 nm and a roughness of 12.1 nm Sa. The average fitted radius of the microlens array units is 406.145 µm, which is 1.54% different from the design radius.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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