Mixed-Mode Fracture behaviour of Si-C-N coatings

Abstract

Micro-electro-mechanical systems (MEMS) technology has made it possible for the semiconductor industry to construct systems and devices on silicon substrates. Nanocomposite Si-C-N coatings must have reliable characteristics for MEMS as well as in the form of protective coatings for heavy-duty industries like aerospace, automobiles, reactors, etc. Vickers indentation was used to study the fracture response of Si-C-N coatings that were deposited on silicon substrates. Images of the fractured regions which consisted of different types of cracks were analyzed and used for qualitative fracture analysis. The Drucker-Prager (DP) model and subsurface layer distributions were used to evaluate the fractured zones. Microscopic evaluation and supporting image analysis were used to study the growth nature of the coatings.

Keywords

• Si-C-N
• Hard coating
• Vickers micro indentation
• Fracture
• Cracks