Nature Communications (Jan 2020)

Robust ultraclean atomically thin membranes for atomic-resolution electron microscopy

  • Liming Zheng,
  • Yanan Chen,
  • Ning Li,
  • Jincan Zhang,
  • Nan Liu,
  • Junjie Liu,
  • Wenhui Dang,
  • Bing Deng,
  • Yanbin Li,
  • Xiaoyin Gao,
  • Congwei Tan,
  • Zi Yang,
  • Shipu Xu,
  • Mingzhan Wang,
  • Hao Yang,
  • Luzhao Sun,
  • Yi Cui,
  • Xiaoding Wei,
  • Peng Gao,
  • Hong-Wei Wang,
  • Hailin Peng

DOI
https://doi.org/10.1038/s41467-020-14359-0
Journal volume & issue
Vol. 11, no. 1
pp. 1 – 8

Abstract

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High-resolution electron microscopy requires robust and noise-free substrates to support the specimens. Here, the authors present a polymer- and transfer-free direct-etching method for fabrication of graphene grids with ultraclean surfaces and demonstrate cryo-EM at record high resolution.