Simulation-Based Design and Analysis for MEMS Vibrating Ring Gyroscope

Abstract

Microelectromechanical system (MEMS) inertial sensors are integral components in a variety of smart electronic devices, most notably MEMS vibrating gyroscopes, which are rotational inertial sensors. The applications of MEMS vibrating gyroscopes range from household appliances to GPS and even to military applications. However, the stability and reliability of these MEMS inertial sensors in space applications still pose challenges. In this research study, we introduce a simple design for a vibrating ring gyroscope with eight semicircular support springs connected to outside-placed anchors. The symmetric design structure with semicircular support springs provides higher sensitivity while minimizing mode mismatch. The design and modelling analysis of the vibrating ring gyroscope was conducted using Ansys 2023 R1. The proposed vibrating ring gyroscope has a ring radius of 1000 µm, a 210 µm radius for the semicircular support springs, a ring and support spring thicknesses of 10 µm, and an area of 80 × 80 µm2 for the outside-placed anchors. The vibrating ring gyroscope operates at two identical elliptical-shape resonant modes, one for driving resonance frequency and the other for sensing resonance frequency. Both simulated resonance frequencies were measured at 48.78 kHz and 48.80 kHz. The modelled result achieved a mode mismatch of 0.02 kHz, which can be easily rectified with tuning electrodes.

Keywords

• MEMS
• vibrating ring gyroscope
• mode matching
• inertial sensor
• IMU
• ring resonator