Vibration Sensors on Flexible Substrates Based on Nanoparticle Films Grown by Physical Vapor Deposition

Abstract

Flexible electronics have gained a lot of attention in recent years due to their compatibility with soft robotics, artificial arms, and many other applications. Meanwhile, the detection of acoustic frequencies is a very useful tool for applications ranging from voice recognition to machine condition monitoring. In this work, the dynamic response of Pt nanoparticles (Pt NPs)-based strain sensors on flexible substrates is investigated. the nanoparticles were grown in a vacuum by magnetron-sputtering inert-gas condensation. Nanoparticle sensors made on cracked alumina deposited by atomic layer deposition on the flexible substrate and reference nanoparticle sensors, without the alumina layer, were first characterized by their response to strain. The sensors were then characterized by their dynamic response to acoustic frequency vibrations between 20 Hz and 6250 Hz. The results show that alumina sensors outperformed the reference sensors in terms of voltage amplitude. Sensors on the alumina layer could accurately detect frequencies up to 6250 Hz, compared with the reference sensors, which were sensitive to frequencies up to 4250 Hz, while they could distinguish between two neighboring frequencies with a difference of no more than 2 Hz.

Keywords

• vibration sensor
• strain sensor
• nanoparticles
• physical vapor deposition
• platinum
• e-skin