NaCl-Assisted Chemical Vapor Deposition of Large-Domain Bilayer MoS<sub>2</sub> on Soda-Lime Glass

Qingguo Gao; Lvcheng Chen; Simin Chen; Zhi Zhang; Jianjun Yang; Xinjian Pan; Zichuan Yi; Liming Liu; Feng Chi; Ping Liu; Chongfu Zhang

doi:10.3390/nano12172913

Nanomaterials (Aug 2022)

NaCl-Assisted Chemical Vapor Deposition of Large-Domain Bilayer MoS<sub>2</sub> on Soda-Lime Glass

Qingguo Gao,
Lvcheng Chen,
Simin Chen,
Zhi Zhang,
Jianjun Yang,
Xinjian Pan,
Zichuan Yi,
Liming Liu,
Feng Chi,
Ping Liu,
Chongfu Zhang

Affiliations

Qingguo Gao: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Lvcheng Chen: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Simin Chen: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Zhi Zhang: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Jianjun Yang: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Xinjian Pan: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Zichuan Yi: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Liming Liu: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Feng Chi: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Ping Liu: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
Chongfu Zhang: School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China

DOI: https://doi.org/10.3390/nano12172913
Journal volume & issue: Vol. 12, no. 17
p. 2913

Abstract

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In recent years, two-dimensional molybdenum disulfide (MoS2) has attracted extensive attention in the application field of next-generation electronics. Compared with single-layer MoS2, bilayer MoS2 has higher carrier mobility and has more promising applications for future novel electronic devices. Nevertheless, the large-scale low-cost synthesis of high-quality bilayer MoS2 still has much room for exploration, requiring further research. In this study, bilayer MoS2 crystals grown on soda-lime glass substrate by sodium chloride (NaCl)-assisted chemical vapor deposition (CVD) were reported, the growth mechanism of NaCl in CVD of bilayer MoS2 was analyzed, and the effects of molybdenum trioxide (Mo) mass and growth pressure on the growth of bilayer MoS2 under the assistance of NaCl were further explored. Through characterization with an optical microscope, atomic force microscopy and Raman analyzer, the domain size of bilayer MoS2 prepared by NaCl-assisted CVD was shown to reach 214 μm, which is a 4.2X improvement of the domain size of bilayer MoS2 prepared without NaCl-assisted CVD. Moreover, the bilayer structure accounted for about 85%, which is a 2.1X improvement of bilayer MoS2 prepared without NaCl-assisted CVD. This study provides a meaningful method for the growth of high-quality bilayer MoS2, and promotes the large-scale and low-cost applications of CVD MoS2.

Published in Nanomaterials

ISSN: 2079-4991 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Science: Chemistry
Website: https://www.mdpi.com/journal/nanomaterials

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