MATEC Web of Conferences (Jan 2016)

Bifurcations of Equilibrium Forms of NEMS/MEMS as a Sensor of Microphysical Alterations

  • Skubov Dmitrii,
  • Lukin Alexey,
  • Popov Ivan,
  • Shtukin Lev

DOI
https://doi.org/10.1051/matecconf/20167601001
Journal volume & issue
Vol. 76
p. 01001

Abstract

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In our work the results of analytical and numerical investigation of equilibrium forms of round conductive and ferromagnetic micro-membrane situated in uniform electrostatic or magnetic static field and also the branching of equilibrium forms of the system of two and three nano-layers with direct currents are described. The structure of this type is practically realizable and exercisable as a sensor of alteration of external and inner mechanical and electrical characteristics. Exactly in a case of nano/micro schemes it is necessary to take in account the nonlinearity of its interaction, which leads to significantly nonlinear effects. On a base of nonlinearity we can determine the alteration of mechanical and electrical characteristics. This type of nonlinear effects mostly unattainable in macroscale but in case of nano- or microscale their realization gets off on the first plan and appears as a sensor of small physical alteration.