Development of an Advanced TDDB Analysis Model for Temperature Dependency

Abstract

This paper proposes a hybrid model to describe the temperature dependence of the time-dependent dielectric breakdown (TDDB) phenomenon. TDDB can be expressed in terms of two well-known representative degradation mechanisms: The thermo-chemical (TC) mechanism and the anode hole injection (AHI) mechanism. A single model does not account for the measured lifetime, due to TDDB under different temperature conditions. Hence, in the proposed model, two different degradation mechanisms are considered simultaneously in an appropriate manner to describe the trap generation in the dielectric layer. The proposed model can be used to simulate the generation of the percolation path in a dielectric layer, and it is in agreement with the measured lifetime because of TDDB at different temperatures. Therefore, the proposed model can be used to predict guarantee time or initial failure detection, using the accelerated life test for industrial purposes.

Keywords

• reliability
• time-dependent dielectric breakdown (TDDB)
• degradation
• oxide dielectric
• dielectric breakdown