Dynamic Mechanical Simulation of Miniature Silicon Membrane during Air Blast for Pressure Measurement

Abstract

The development of new ultra-fast sensors for pressure air blast monitoring requires taking into account the very short rise time of pressure occurring during explosion. Simulations show here that the dynamic mechanical behavior of membrane-based sensors depends significantly on this rise time when the fundamental mechanical resonant frequency of the membrane is higher than 10 MHz.

Keywords

• air blast
• pressure sensor
• dynamic behavior
• silicon membrane