Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products

Abstract

MEMS resonant sensing devices require both HF ( f ) and low dissipation or high quality factor ( Q ) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q product at higher orders. The third order resonance exhibits an approximately 15-fold increase in f‧Q product, while the Q factor remains nearly constant. Consequently, we achieved an ultrahigh f‧Q product exceeding 10 ^12 Hz by higher-order resonances in single-crystal diamond cantilevers.

Keywords

• diamond
• MEMS
• cantilevers
• resonance
• high orders