Influence of nanocrystalline structure and composition on hardness of thin films based on TiO2

• Kaczmarek Danuta,
• Wojcieszak Damian,
• Domaradzki Jaroslaw,
• Prociow Eugeniusz,
• Placido Frank,
• Lapp Steffen,
• Dylewicz Rafal

Affiliations

Kaczmarek Danuta

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372, Wroclaw, Poland

Wojcieszak Damian

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372, Wroclaw, Poland

Domaradzki Jaroslaw

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372, Wroclaw, Poland

Prociow Eugeniusz

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372, Wroclaw, Poland

Placido Frank

Thin Film Centre, University of the West of Scotland, High Street, Paisley, PA1 2BE, Scotland

Lapp Steffen

Thin Film Centre, University of the West of Scotland, High Street, Paisley, PA1 2BE, Scotland

Dylewicz Rafal

Department of Electronics & Electrical Engineering, University of Glasgow, Oakfield Avenue, Glasgow, G12 8LT, Scotland