A 3-Degree-of-Freedom MEMS Mirror with Controllable Static and Dynamic Motion for Beam Steering

Elnaz Afsharipour; Byoungyoul Park; Ramin Soltanzadeh; Cyrus Shafai

doi:10.3390/proceedings2130938

Proceedings (Dec 2018)

A 3-Degree-of-Freedom MEMS Mirror with Controllable Static and Dynamic Motion for Beam Steering

Elnaz Afsharipour,
Byoungyoul Park,
Ramin Soltanzadeh,
Cyrus Shafai

Affiliations

Elnaz Afsharipour: Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB R3T 2N2, Canada
Byoungyoul Park: Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB R3T 2N2, Canada
Ramin Soltanzadeh
Cyrus Shafai: Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB R3T 2N2, Canada

DOI: https://doi.org/10.3390/proceedings2130938
Journal volume & issue: Vol. 2, no. 13
p. 938

Abstract

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A 3 Degree-of-Freedom (DOF) MEMS mirror is presented which can direct the light beam on an objective point and also operate in a continuous resonance 2 DOF mode. The micro-mirror is actuated by Lorentz force and has 4 actuators embedded in 4 sides of a square mirror. By enabling the actuators, different types of tilting and linear motion can be achieved. The micro-mirror is able to work in either static mode by applying dc current or dynamic mode by applying an ac current at the mirror resonance frequency. The mirror showed a maximum tilt angle of 14.5° and 20° for an input rms power of 2 mW in the resonance mode. A linear motion of 200 µm was achieved by 65 mW of dc power.

Published in Proceedings

ISSN: 2504-3900 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: General Works
Website: http://www.mdpi.com/journal/proceedings

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