CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

Abstract

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

Keywords

• FBAR
• film bulk acoustic resonator
• CMOS
• DNA
• thickness shear mode
• TSM
• label-free
• biosensor
• biomolecular interaction analysis