Effect of spin coating speeds on electrical and optical characteristic of perovskite SrTiO3 thin films prepared by sol-gel method

Abstract

The perovskite strontium titanate (SrTiO3/STO) was prepared by the sol-gel process, and the STO thin film was deposited onto a glass substrate by the spin coating method. Effect of different spin coating speeds on the thickness, structural, optical, and electrical properties of the STO thin films was discussed. Five STO films with various spin coating parameters of 2000, 4000, 6000, 8000, and 10000 RPM were prepared. Thickness profilometer tests have shown that the thickness of the STO film changes from 802 nm at 10000 RPM to 1321 nm at 2000 RPM spin coating speed. The prepared STO films morphology was examined by scanning electron microscope. X-ray diffraction measurements have shown that crystalline STO films have been produced with a cubic perovskite structure. The optical properties of the prepared STO films were investigated using an ultraviolet visible spectrophotometer, and the results indicated that the STO film at 8000 and 4000 RPM spin speed show the lowest and the maximum optical band gap (2.83 and 2.90 eV, respectively). All STO films have absorption coefficient values higher than 103 cm−1. The prepared STO thin films had a refractive index between 2.40 and 2.42. The electrical characteristics of the prepared STO films were investigated using the four-point probe method, and it was found that as the spin coating speed increased from 2000 to 8000 RPM, the resistivity of the STO films reduced from 6.629∗1010 to 3.009∗1010 Ω. Moreover, the STO film at 8000 RPM spin speed has the best electrical conductivity (3.301∗10−5 S m−1).

Keywords

• Perovskite
• SrTiO3
• Thin film
• Structure
• Optical
• Bandgap