Sensors & Transducers (Aug 2009)
Compensation of Imperfections for Vibratory Gyroscope Systems Using State Observers
Abstract
This paper presents a novel approach that can compensate errors resulting from the imperfections of mechanical structures and interface circuits for MEMS gyroscope systems. Different from most of existing researches on gyroscopes wherein the mechanical structure and interface circuit are either assumed to be ideal or optimized individually, this approach uses state estimation techniques to compensate all those errors and to obtain correct angular rates in real time. The mechanical structure errors discussed in this paper may come from structure designs and fabrication imperfections. The interface circuit errors include: mismatch of differential capacitors, parasitic capacitance, offset voltage of operation amplifiers, and circuit noise. Simulation results indicates that, with the presence of those errors and a signal-to-noise ratio around 20, the proposed method can measure time-varying angular rates with a bandwidth up to 30 Hz and a sensing accuracy of 1×10-2 rad/sec.