E3S Web of Conferences (Jan 2023)

Architecture of composite multilayer semiconductor nanostructures

  • Vetrova N. A.,
  • Kuimov E. V.,
  • Meshkov S. A.,
  • Makeev M. O.,
  • Sinyakin V. Yu.,
  • Shasurin V. D.

DOI
https://doi.org/10.1051/e3sconf/202341302026
Journal volume & issue
Vol. 413
p. 02026

Abstract

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The problem of ensuring the operational parameters of composite multilayer semiconductor nanoscale structures at the design technology stages is solved. A mathematical model based on the physics of processes occurring in the structure during operation is developed. The problem is solved for the resonant-tunnelling AlGaAs nanoheterostructures.