The surfaces of ceramic products are replete with numerous defects, such as those that appear during the diamond grinding of sintered SiAlON ceramics. The defective surface layer is the reason for the low effectiveness of TiZrN coatings under abrasive and fretting wear. An obvious solution is the removal of an up to 4-µm-thick surface layer containing the defects. It was proposed in the present study to etch the layer with fast argon atoms. At the atom energy of 5 keV and a 0.5 mA/cm2 current density, the ions were converted into fast atoms and the sputtering rate for the SiAlON samples reached 20 μm/h. No defects were observed in the microstructures of coatings deposited after beam treatment for half an hour. The treatment reduced the volumetric abrasive wear by five times. The fretting wear was reduced by three to four times.
