A Novel Approach for a Chip-Sized Scanning Optical Microscope

Joan Canals; Nil Franch; Victor Moro; Sergio Moreno; Juan Daniel Prades; Albert Romano-Rodríguez; Steffen Bornemann; Daria D. Bezshlyakh; Andreas Waag; Florian Vogelbacher; Stefan Schrittwieser; Katarzyna Kluczyk-Korch; Matthias Auf der Maur; Aldo Di Carlo; Angel Diéguez

doi:10.3390/mi12050527

Micromachines (May 2021)

A Novel Approach for a Chip-Sized Scanning Optical Microscope

Joan Canals,
Nil Franch,
Victor Moro,
Sergio Moreno,
Juan Daniel Prades,
Albert Romano-Rodríguez,
Steffen Bornemann,
Daria D. Bezshlyakh,
Andreas Waag,
Florian Vogelbacher,
Stefan Schrittwieser,
Katarzyna Kluczyk-Korch,
Matthias Auf der Maur,
Aldo Di Carlo,
Angel Diéguez

Affiliations

Joan Canals: Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Nil Franch: Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Victor Moro: Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Sergio Moreno: Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Juan Daniel Prades: Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Albert Romano-Rodríguez: Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Steffen Bornemann: Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany
Daria D. Bezshlyakh: Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany
Andreas Waag: Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany
Florian Vogelbacher: Molecular Diagnostics, AIT Austrian Institute of Technology, 1210 Vienna, Austria
Stefan Schrittwieser: Molecular Diagnostics, AIT Austrian Institute of Technology, 1210 Vienna, Austria
Katarzyna Kluczyk-Korch: Dipartimento di Ingegneria Elettronica, University of Rome Tor Vergata, 00133 Rome, Italy
Matthias Auf der Maur: Dipartimento di Ingegneria Elettronica, University of Rome Tor Vergata, 00133 Rome, Italy
Aldo Di Carlo: Dipartimento di Ingegneria Elettronica, University of Rome Tor Vergata, 00133 Rome, Italy
Angel Diéguez: Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain

DOI: https://doi.org/10.3390/mi12050527
Journal volume & issue: Vol. 12, no. 5
p. 527

Abstract

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The recent advances in chip-size microscopy based on optical scanning with spatially resolved nano-illumination light sources are presented. This new straightforward technique takes advantage of the currently achieved miniaturization of LEDs in fully addressable arrays. These nano-LEDs are used to scan the sample with a resolution comparable to the LED sizes, giving rise to chip-sized scanning optical microscopes without mechanical parts or optical accessories. The operation principle and the potential of this new kind of microscope are analyzed through three different implementations of decreasing LED dimensions from 20 µm down to 200 nm.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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Abstract

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