Micromachines
(May 2021)
A Novel Approach for a Chip-Sized Scanning Optical Microscope
Joan Canals,
Nil Franch,
Victor Moro,
Sergio Moreno,
Juan Daniel Prades,
Albert Romano-Rodríguez,
Steffen Bornemann,
Daria D. Bezshlyakh,
Andreas Waag,
Florian Vogelbacher,
Stefan Schrittwieser,
Katarzyna Kluczyk-Korch,
Matthias Auf der Maur,
Aldo Di Carlo,
Angel Diéguez
Affiliations
Joan Canals
Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Nil Franch
Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Victor Moro
Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Sergio Moreno
Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Juan Daniel Prades
Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Albert Romano-Rodríguez
Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
Steffen Bornemann
Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany
Daria D. Bezshlyakh
Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany
Andreas Waag
Institute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, Germany
Florian Vogelbacher
Molecular Diagnostics, AIT Austrian Institute of Technology, 1210 Vienna, Austria
Stefan Schrittwieser
Molecular Diagnostics, AIT Austrian Institute of Technology, 1210 Vienna, Austria
Katarzyna Kluczyk-Korch
Dipartimento di Ingegneria Elettronica, University of Rome Tor Vergata, 00133 Rome, Italy
Matthias Auf der Maur
Dipartimento di Ingegneria Elettronica, University of Rome Tor Vergata, 00133 Rome, Italy
Aldo Di Carlo
Dipartimento di Ingegneria Elettronica, University of Rome Tor Vergata, 00133 Rome, Italy
Angel Diéguez
Department of Electronic and Biomedical Engineering, University of Barcelona, 08028 Barcelona, Spain
DOI
https://doi.org/10.3390/mi12050527
Journal volume & issue
Vol. 12,
no. 5
Abstract
Read online
The recent advances in chip-size microscopy based on optical scanning with spatially resolved nano-illumination light sources are presented. This new straightforward technique takes advantage of the currently achieved miniaturization of LEDs in fully addressable arrays. These nano-LEDs are used to scan the sample with a resolution comparable to the LED sizes, giving rise to chip-sized scanning optical microscopes without mechanical parts or optical accessories. The operation principle and the potential of this new kind of microscope are analyzed through three different implementations of decreasing LED dimensions from 20 µm down to 200 nm.
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