Scalable growth of vertically oriented graphene nanosheets with high rate by a high-flux mesoplasma chemical vapor deposition
Junjie Wang,
Huan Zhang,
Yunxing Zhao,
Lingze Yao,
Min Zhao,
Xiaoliang Xu,
Baojie Yan,
Jichun Ye,
Yusheng Zhao,
Sudong Wu
Affiliations
Junjie Wang
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China; Nano Science and Technology Institute, University of Science and Technology of China, Suzhou 215123, P.R. China
Huan Zhang
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China
Yunxing Zhao
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China
Lingze Yao
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China; Nano Science and Technology Institute, University of Science and Technology of China, Suzhou 215123, P.R. China
Min Zhao
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China; Nano Science and Technology Institute, University of Science and Technology of China, Suzhou 215123, P.R. China
Xiaoliang Xu
Key Laboratory of Strongly-Coupled Quantum Matter Physics, Chinese Academy of Sciences, School of Physical Sciences, University of Science and Technology of China, Hefei, 230026, P. R. China; Corresponding authors.
Baojie Yan
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China
Jichun Ye
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China; Corresponding authors.
Yusheng Zhao
Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, P.R. China; Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices, Southern University of Science and Technology, Shenzhen 518055, P.R. China
Sudong Wu
Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, P.R. China; Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices, Southern University of Science and Technology, Shenzhen 518055, P.R. China; Corresponding authors.
The Vertically Oriented Graphene Nanosheets (VGNs) possesses many promising properties and attracts intense interests in various applications due to its unique nanoarchitecture and intrinsic properties of graphene. However, a scalable growth of VGNs film with high rate is still an open challenge that hampers both the scientific research and mass applications. Herein, we report for the first time a large area growth of VGNs film with high rate via a high-density and high-flux mesoplasma chemical vapor deposition by rotating the substrate. A uniform VGNs film on a large area with a high growth rate on the order of ten micrometer per minute has been obtained. A continues growth process of VGNs film with high rate is also predicted by sweeping the substrate, which gives a new route for the scalable growth of VGNs film with high rate for the future mass applications.
