Manufacture of Piezoelectric Sensor Dedicated to Airflow Velocity Detection

Abstract

This paper researches the dedicated piezoelectric sensor for airflow information sensitivity which uses PZT-5A piezoelectric material and rigid polyurethane foam to act as its matching materials. It adopts multiplex mode to realize the broadband design of sensor and does finite element simulation to establish admittance grid, sound field distribution diagram and model in which cylinder is added with matching layer. Finally dedicated piezoelectric sensor is manufactured through technical study. It keeps the features of center frequency 230 kHz, resonance point sound pressure level 90 dB, resonance point -3 dB and beam width 7.6°in which doublet coupling helps form wider working band.

Keywords

• Piezoelectric sensor
• Ultrasonic wave
• Finite element
• Multiplex mode.