A Novel 3D Topography Stitching Algorithm Based on Reflectance and Multimap

Abstract

Surface topography is an efficient tool for the understanding of physical phenomena, especially if multiscale roughness analysis is performed. However, the observable scale range in a topography measured with 3D optical profilometers is quite limited. Therefore, all scales linked to a physical phenomenon might not be measured, which impedes the correct analysis of the surface. Stitching of 3D topographies, a technique combining elementary topographic maps into a larger one, can be used to increase the scale range for an objective lens. A high resolution over a large field of measurement topography is then generated. A literature review of 3D topography stitching algorithm highlights the stitching procedure, and detailed explanations on in-plane registration algorithms are provided. However, some existing 3D topography stitching algorithms are not sufficiently accurate for the registration of surface, especially at smaller scales. This paper proposes a new reflectance-based multimap 3D stitching algorithm and three of its variants. These algorithm variants are compared to three existing 3D stitching algorithms (geometric, cross-correlation and global optimization of differences) on four test cases, containing measured elementary topographic maps obtained on four surfaces and with four 3D optical profilometers (two focus variation microscopes and two interferometers). Five qualitative and quantitative criteria and indicators are proposed for the comparison of 3D topography stitching algorithms: visual inspection, run time, memory usage, mean repositioning error and stitching error estimator. Lastly, two quantitative indicators and criteria are new indicators proposed in this article. Overall, the new 3D stitching algorithms based on reflectance and multimaps have a lower mean repositioning error and stitching error estimator compared to other existing algorithms. This highlights the relevance of multimap stitching algorithms in the case of 3D topographies. A new decision-helping tool, the stitching gain lift plot (SGL plot), is described for the selection of the best stitching algorithm for a given test case. The SGL plot especially highlights the higher performance of two of the variants of the novel algorithm compared to the three existing 3D stitching algorithms.

Keywords

• stitching
• topography
• reflectance
• roughness
• multimap