Nature Communications (Oct 2022)

Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces

  • Lingyu Huang,
  • Kang Xu,
  • Dandan Yuan,
  • Jin Hu,
  • Xinwei Wang,
  • Shaolin Xu

DOI
https://doi.org/10.1038/s41467-022-33644-8
Journal volume & issue
Vol. 13, no. 1
pp. 1 – 10

Abstract

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Fabrication of metasurfaces with nanoscale structures is inefficient for large areas. Here, the authors introduce patterned pulse laser lithography for creating structured arrays with sub-wavelength feature on large-area thin films under ambient conditions.