Recent developments on electron optics simulator

Abstract

Recent developments on the electron optics simulator (EOS) are reported in this paper. The EOS is a finite element two-dimensional (2D) and three-dimensional (3D) electrostatic particle steady-state trajectory code that has been widely used for beam optics modeling of vacuum electronic devices. To extend the application scope and improve the computation efficiency, four significant advances have been made and are presented in this paper. First, the code is reprogrammed to consider physical models that contain dielectrics and to support charge excitation. Second, more primary particle emission models are added in EOS to meet the needs for simulating electron and ion optics devices for diverse applications. For the precise simulation of the secondary electron emission, the Vaughan model is improved, and the Furman model is newly added in EOS. Finally, the algebraic multigrid algorithm has been embedded in EOS, which can significantly improve the computation efficiency for problems with large-scale matrices. For these developments, the necessary principles and corresponding performance are shown in detail in this paper.