Influence of substrate temperature on the properties of ZnTe:Cu films prepared by a magnetron co-sputtering method
Hongwei Li,
Haofei Huang,
Azhati Lina,
Ke Tang,
Zhuorui Chen,
Zilong Zhang,
Ke Xu,
Keke Ding,
Linjun Wang,
Jian Huang
Affiliations
Hongwei Li
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
Haofei Huang
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
Azhati Lina
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
Ke Tang
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China; Zhejiang Institute of Advanced Materials, SHU, Jiashan 314113, China; Corresponding author. School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China.
Zhuorui Chen
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
Zilong Zhang
Research Center for Functional Materials, National Institute for Materials Sciences (NIMS), Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan
Ke Xu
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
Keke Ding
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
Linjun Wang
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China; Zhejiang Institute of Advanced Materials, SHU, Jiashan 314113, China; Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology, Shanghai, China
Jian Huang
School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China; Zhejiang Institute of Advanced Materials, SHU, Jiashan 314113, China; Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology, Shanghai, China; Corresponding author. School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China.
Copper-doped Zinc Tellurium (ZnTe:Cu) films were deposited on borosilicate glass using magnetron co-sputtering technique. The influence of the substrate temperature on the structural, morphological, optical and electrical properties of ZnTe:Cu films was investigated by X-ray diffraction (XRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), UV–Vis spectrophotometer and Hall effect measurement system. The results indicate that substrate temperature significantly affects the properties of the ZnTe:Cu films. When the substrate temperature increases from room temperature to 600 °C, the (111)-preferred orientation of ZnTe:Cu films is gradually replaced by the (220)-preferred orientation. At high substrate temperatures (≥500 °C), the CuxTe phase appears in the ZnTe:Cu films, resulting in higher carrier concentration (>1019 cm−3) and lower resistivity (<10−2 Ω cm) of the prepared films.
