Open Physics (Feb 2013)

The new method of fabrication of submicron structures by optical lithography with mask shifting and mask rotation

Indykiewicz Kornelia,
Hajłasz Marcin,
Paszkiewicz Bogdan

Affiliations

Indykiewicz Kornelia: Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50 - 372, Wrocław, Poland
Hajłasz Marcin: Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50 - 372, Wrocław, Poland
Paszkiewicz Bogdan: Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50 - 372, Wrocław, Poland

DOI: https://doi.org/10.2478/s11534-012-0166-0
Journal volume & issue: Vol. 11, no. 2
pp. 219 – 225

Abstract

No abstracts available.

Published in Open Physics

ISSN: 2391-5471 (Online)
Publisher: De Gruyter
Country of publisher: Poland
LCC subjects: Science: Physics
Website: https://www.degruyter.com/journal/key/phys/html

About the journal