Novel MEMS Sensor for Detecting Magnetic Particles in Liquids

Abstract

We present a novel MEMS sensor for the detection of magnetic particles in liquids, which consists of a microcantilever excited piezoelectrically in resonance and having an integrated planar coil on its free end. Due to the latter component, magnetic particles are attracted and accumulate on the sensor surface. The additional mass introduced by the particles changes the resonance frequency of the microcantilever serving as measured quantity. To evaluate our design, we dispersed 250 nm iron-oxide particles in de-ionized water and monitored the resonance frequency during particle accumulation. 100 min after measurement start, a total resonance frequency shift of 6 kHz was found, which can easily be measured and shows the high potential of the proposed sensor design.

Keywords

• MEMS sensor
• microcantilever
• magnetic particles
• resonant mass sensing