Investigation of Position and Velocity Stability of the Nanometer Resolution Linear Motor Stage with Air Bearings by Shaping of Controller Transfer Function

Abstract

Modern industrial enterprises require high accuracy and precision feedback systems to fulfil cutting edge requirements of technological processes. As demand for a highly accurate system grows, a thin gap between throughput and quality exists. The conjunction of ultrafast lasers and modern control strategies of mechatronic systems can be taken into account as an effective solution to reach both throughput and tolerances. In the present paper, the dynamic errors of the moving platform of the one degree of freedom stage, based on linear motor and air bearings, have been analyzed. A precision positioning system is investigated as a symmetric system which is based on symmetric linear motor. The goal of the present article is to investigate the controllers of the different architecture and to find the best controller that can ensure a stable and small dynamic error of the displacement of the stage platform at four different constant velocities of the moving platform. The relations between the controller order, velocity and the displacement dynamic error have been investigated. It is determined that higher-order controllers can reduce the dynamic error significantly at low velocities of the moving platforms: 1 and 5 mm/s. On the contrary, the low order controllers of 4th-degree polynomials of the transfer function can also provide small dynamic errors of the displacement of the platform.

Keywords

• air bearings
• linear motors
• position control
• velocity control
• nanotechnologies
• frequency response function